Technology is our world
Home » Microelectronics » Scanning Acoustic Microscopy
The Autowafer 300 sets new standards in wafer inspection and metrology by combining exceptional reliability with advanced engineering. Designed for the most demanding environments, its robust architecture ensures long-lasting performance and minimal maintenance. With advanced receiver interfaces and high-speed signal sampling, the Autowafer 300 delivers the accuracy and effi ciency required in semiconductor research and manufacturing.
Primary applications include the detection of voids, inclusions, and delaminations in bond interfaces, as well as identifying layer thickness variations in multilayer structures. Such defects may occur in different layers of the component. In mass production, high throughput is essential. Therefore, proprietary software supports simultaneous inspection of multiple layers. Additionally, multiple transducers, full tray scanning, and optimized tray handling are available.
SAM Auto Tray is a customer-specific solution for inline process diagnostics and process control which can be integrated into any production environment thanks to the following features:
The SAM Auto Panel meets Class 10 cleanroom requirements and are capable of reliably detecting defects such as gaps, voids, holes, inclusions, delaminated areas, or thickness variations in sintered or soldered interfaces. Simultaneous inspection of multiple layers is also possible with our systems.
Our machines can inspect panels ranging in size, for example, from 300 mm x 300 mm up to 750 mm x 750 mm, making them ideally suited for advanced packaging technologies such as PLP (FO-PLP), where tested chips (Known Good Dies, KGDs) are embedded into large rectangular panels and redistribution layers (RDLs) are built—eliminating the need for conventional laminate substrates.
The SAM Lab system is characterized by high throughput, exceptional flexibility, and a large scanning area. They can be expanded and customized according to customer requirements for a wide range of applications. The latest high-frequency and transducer technologies support specialized high-end research and industrial applications, offering frequencies up to 400 MHz, and selectable frequency ranges between 100 MHz and 1,000 MHz. Each transducer is equipped with its own autofocus.
EMEA Electro Solutions is always online, always updated and connected to you.
Our Product Managers are fully trained to help you. Just let us know what are your needs and specifications.
Our aim is provide you best in class and state of the art solutions.
Always with our customers, full service support.